Thin Film Micro-Optics

This work presents advances in thin films for applications in the fields of integrated optics, micro-optics, optical telecommunications and optoelectronics. It delineates the performance characteristics needed for graded coatings, damage-resistant laser coatings and many others. Basic theory and applications are illustrated.

"Thin-film microoptics" stands for novel types of microoptical components and systems which combine the well-known features of miniaturized optical elements with the specific advantages of thin optical layers. This approach enables for innovative solutions in shaping light fields in spatial, temporal and spectral domain. Low-dispersion and small-angle systems for tailoring and diagnosing laser pulses under extreme conditions as well as VUV-capable microoptics can be realized. Continuous-relief microstructures of refractive, reflective and hybrid characteristics are obtained by vapor deposition technologies with shadow masks in rotating systems. The book gives a comprehensive overview on fundamental laws of microoptics, types of thin-film microoptical components, methods and constraints of their design, fabrication and characterization, structure transfer into substrates, optical functions and applications. Recent theoretical and experimental results of basic and applied research are addressed. Particular emphasis will be laid on the generation of localized, nondiffracting few-cycle wavepackets of extended depth of focus and high tolerance against distortions. It is shown that the spectral interference of ultrabroadband conical beams results in spatio-temporal structures of characteristic X-shape, so-called X-waves, which are interesting for robust optical communication. New prospects are opened by exploiting small conical angles from nanolayer microoptics and self-apodized truncation of Bessel beams leading to the formation of single-maximum nondiffracting beams or "needle beams". Thin-film microoptical beam shapers have an enormous potential for future applications like the two-dimensional ultrafast optical processing, multichannel laser-matter interaction, nonlinear spectroscopy or advanced measuring techniques. - Introduces a new and promising branch of microoptics - Gives a compact overview on the types, properties and applications of the most important microoptical components containing valuable data and facts - Helps to understand the basic optical laws - Reports on the historical development line of thin-film microoptics - Provides brand new results of research and development in the field of ultrashort-pulse laser beam shaping and diagnostics - Discusses the future trends and first approaches of next generation microoptics - Contains a carefully assorted glossary of the most important technical terms

Sculptured thin films (STFs) are a class of nanoengineered materials with properties that can be designed and realized in a controllable manner using physical vapor deposition. This text, presented as a short course at the SPIE Optical Science and Technology Symposium, couples detailed knowledge of thin-film morphology with the optical response characteristics of STF devices. An accompanying CD contains Mathematica(TM) programs for use with the presented formalisms. Thus, readers will learn to design and engineer STF materials and devices for future applications, particularly with optical applications. Graduate students in optics and practicing optical engineers will find the text valuable, as well as those interested in emerging nanotechnologies for optical devices.

An important resource for novices in the field and for those experienced in optical thin film design and production, this up-to-date reference/text discusses the fundamentals, equipment, materials, and processes necessary to produce thin film optical coatings successfully - demonstrating how to optimize control sensitivity and repeatability of films to achieve desired effects. Written by a seasoned optical engineer who reveals "insider" information and insights that enhance productivity, Practical Design and Production of Optical Thin Films puts forth thin film fundamentals from a new viewpoint; provides formulas for estimating the number of layers and thickness needed to meet given requirements; introduces Fourier analysis and synthesis without mathematics in a manner not available in other books; supplies important literature references on the deposition of practical optical coatings materials; offers examples of using "Design of Experiments" methodology for process development, optimization, and stabilization; covers a broad range of film thickness monitoring and control techniques, and more. Enriched with over 200 drawings, equations, and tables, Practical Design and Production of Optical Thin Films serves as an outstanding on-the-job reference for optical thin film designers, research scientists, technicians; thin film process engineers and technicians; thin film production engineers and operators; optical engineers and designers; and lens designers; as well as a superb text for upper-level undergraduate, graduate, and continuing-education students in these disciplines.

Proceedings of the 20th Course of the International School of Quantum Electronics held in Erice, Italy, November 14-24, 1996

This book provides a brief research source for optical fiber sensors for energy production and storage systems, discussing fundamental aspects as well as cutting-edge trends in sensing. This volume provides industry professionals, researchers and students with the most updated review on technologies and current trends, thus helping them identify technology gaps, develop new materials and novel designs that lead to commercially viable energy storage systems.

This text examines the technology behind the plethora of modern industrial and domestic technologies which incorporate micro-optics eg. CDs, cameras, automated manufacturing systems, mobile communications etc. It includes a simple but comprehensive introduction to micro-optical developments design, and an overview of fabrication and replication technology. The theoretical, practical and industrial developments in micro-scale optoelectronics continue apace in the late 1990s. In this book, a distinguished group of physicists and engineers describe the current state of research and applications in micro-optics. It provides the theoretical background and an overview of current technology, with several chapters taking a deeper look at specific recent applications and future trends. The book concentrates on diffractive and refractive micro- optical elements, such as lenses, fan-out gratings, optimized phase elements and polarisers. Sections are included on the simulation and optimization of design for micro-optics and subsequently the efficient transformation from design to real optical elements, using techniques such as e-beam writing, laser beam writing, lithography, etching and thin film deposition.

Among the many atomic/molecular assembling techniques used to develop artificial materials, molecular layer deposition (MLD) continues to receive special attention as the next-generation growth technique for organic thin-film materials used in photonics and electronics. Thin-Film Organic Photonics: Molecular Layer Deposition and Applications describes how photonic/electronic properties of thin films can be improved through MLD, which enables precise control of atomic and molecular arrangements to construct a wire network that achieves "three-dimensional growth". MLD facilitates dot-by-dot—or molecule-by-molecule—growth of polymer and molecular wires, and that enhanced level of control creates numerous application possibilities. Explores the wide range of MLD applications in solar energy and optics, as well as proposed uses in biomedical photonics This book addresses the prospects for artificial materials with atomic/molecular-level tailored structures, especially those featuring MLD and conjugated polymers with multiple quantum dots (MQDs), or polymer MQDs. In particular, the author focuses on the application of artificial organic thin films to: Photonics/electronics, particularly in optical interconnects used in computers Optical switching and solar energy conversion systems Bio/ medical photonics, such as photodynamic therapy Organic photonic materials, devices, and integration processes With its clear and concise presentation, this book demonstrates exactly how MLD enables electron wavefunction control, thereby improving material performance and generating new photonic/electronic phenomena.

The Handbook of Thin Film Deposition is a comprehensive reference focusing on thin film technologies and applications used in the semiconductor industry and the closely related areas of thin film deposition, thin film micro properties, photovoltaic solar energy applications, new materials for memory applications and methods for thin film optical processes. In a major restructuring, this edition of the handbook lays the foundations with an up-to-date treatment of lithography, contamination and yield management, and reliability of thin films. The established physical and chemical deposition processes and technologies are then covered, the last section of the book being devoted to more recent technological developments such as microelectromechanical systems, photovoltaic applications, digital cameras, CCD arrays, and optical thin films. A practical survey of thin film technologies aimed at engineers and managers involved in all stages of the process: design, fabrication, quality assurance and applications Covers core processes and applications in the semiconductor industry and new developments in the photovoltaic and optical thin film industries The new edition takes covers the transition taking place in the semiconductor world from Al/SiO2 to copper interconnects with low-k dielectrics Written by acknowledged industry experts from key companies in the semiconductor industry including Intel and IBM Foreword by Gordon E. Moore, co-founder of Intel and formulator of the renowned ‘Moore’s Law’ relating to the technology development cycle in the semiconductor industry

The Handbook of Thin Film Deposition Techniques: Principles, Methods, Equipment and Applications, Second Edition explores the technology behind the spectacular growth in the silicon semiconductor industry and the continued trend in miniaturization over the last 20 years. This growth has been fueled in large part by improved thin film deposition techniques and the development of highly specialized equipment to enable this deposition. This second edition explains the growth of sophisticated, automatic tools capable of measuring thickness and spacing of submicron dimensions. The book covers PVD, laser and E-beam assisted deposition, MBE, and ion beam methods to bring together all of the physical vapor deposition techniques. The book also includes coverage of chemical mechanical polishing that helps attain the flatness that is required by modern lithography methods and new materials used for interconnect dielectric materials, specifically organic polyimide materials.

In wafer-based and thin-film photovoltaic (PV) devices, the management of light is a crucial aspect of optimization since trapping sunlight in active parts of PV devices is essential for efficient energy conversions. Optical modeling and simulation enable efficient analysis and optimization of the optical situation in optoelectronic and PV devices. Optical Modeling and Simulation of Thin-Film Photovoltaic Devices provides readers with a thorough guide to performing optical modeling and simulations of thin-film solar cells and PV modules. It offers insight on examples of existing optical models, demonstrates the applicability of optical modeling, and presents concrete directions and solutions for improving the devices. Along with giving practical hints, the book highlights significant research, development, and production in the field. It covers numerous approaches of one-, two-, and three-dimensional optical modeling, including one-dimensional semi-coherent modeling and two-dimensional modeling based on the finite element method (FEM). Many practical examples illustrate the use of simulations with the developed models, helping readers better understand and develop their own models as well as appreciate innovative concepts in light management in thin-film PV devices.

Practical, user-oriented reference for engineers who must incorporate and specify coatings for filters, antiglare effects, polarization, or other purposes in optical or electro-optical systems design. It focuses on preparation techniques and characteristics of commercially available products and provides information needed to determine what type of filter is needed to solve a particular problem, what its limitations are, and how to care for it.

The deep interconnection between micro/nanooptical components and related fabrication technologies—and the constant changes in this ever-evolving field—means that successful design depends on the engineer’s ability to accommodate cutting-edge theoretical developments in fabrication techniques and experimental realization. Documenting the state of the art in fabrication processes, Microoptics and Nanooptics Fabrication provides an up-to-date synopsis of recent breakthroughs in micro- and nanooptics that improve key developmental processes. This text elucidates the precise and miniaturized scale of today’s fabrication methods and their importance in creating new optical components to access the spectrum of physical optics. It details successful fabrication techniques and their direct effect on the intended performance of micro- and nanooptical components. The contributors explore the constraints related to material selection, component lateral extent, minimum feature size, and other issues that cause fabrication techniques to lag behind corresponding theory in the development process. Written with the professional optical engineer in mind, this book omits the already well-published broader processing fundamentals. Instead it focuses on key tricks of the trade helpful in reformulating processes to achieve necessary optical targets, improve process fidelity, and reduce production costs. The contributing authors represent the vanguard in micro-optical fabrication. The result of their combined efforts, this searing analysis of emerging fabrication technologies will continue to fuel the expansion of optics components, from the microwave to the infrared through the visible regime.

Proceedings of SPIE present the original research papers presented at SPIE conferences and other high-quality conferences in the broad-ranging fields of optics and photonics. These books provide prompt access to the latest innovations in research and technology in their respective fields. Proceedings of SPIE are among the most cited references in patent literature.

The strong investments into optical telecommunications in the late 1990s resulted in a wealth of new research, techniques, component designs, and understanding of polarization effects in fiber. Polarization Optics in Telecommunications brings together recent advances in the field to create a standard, practical reference for component designers and optical fiber communication engineers. Beginning with a sound foundation in electromagnetism, the author offers a dissertation of the spin-vector formalism of polarization and the interaction of light with media. Applications discussed include optical isolators, optical circulators, fiber collimators, and a variety of applied waveplate and prism combinations. Also included in an extended discussion of polarization-mode dispersion (PMD) and polarization-dependent loss (PDL), their representation, behavior, statistical properties, and measurement. This book draws extensively from the technical and patent literature and is an up-to-date reference for researchers and component designers in industry and academia.