Handbook of Silicon Based MEMS Materials and Technologies

Handbook of Silicon Based MEMS Materials and Technologies
Author: Markku Tilli,Mervi Paulasto-Krockel,Veli-Matti Airaksinen,Sami Franssila,Veikko Lindroos,Ari Lehto,Teruaki Motooka
Publsiher: Elsevier
Total Pages: 668
Release: 2009-12-08
ISBN 10: 9780815519881
ISBN 13: 0815519885
Language: EN, FR, DE, ES & NL

Handbook of Silicon Based MEMS Materials and Technologies Book Review:

A comprehensive guide to MEMS materials, technologies and manufacturing, examining the state of the art with a particular emphasis on current and future applications. Key topics covered include: Silicon as MEMS material Material properties and measurement techniques Analytical methods used in materials characterization Modeling in MEMS Measuring MEMS Micromachining technologies in MEMS Encapsulation of MEMS components Emerging process technologies, including ALD and porous silicon Written by 73 world class MEMS contributors from around the globe, this volume covers materials selection as well as the most important process steps in bulk micromachining, fulfilling the needs of device design engineers and process or development engineers working in manufacturing processes. It also provides a comprehensive reference for the industrial R&D and academic communities. Veikko Lindroos is Professor of Physical Metallurgy and Materials Science at Helsinki University of Technology, Finland. Markku Tilli is Senior Vice President of Research at Okmetic, Vantaa, Finland. Ari Lehto is Professor of Silicon Technology at Helsinki University of Technology, Finland. Teruaki Motooka is Professor at the Department of Materials Science and Engineering, Kyushu University, Japan. Provides vital packaging technologies and process knowledge for silicon direct bonding, anodic bonding, glass frit bonding, and related techniques Shows how to protect devices from the environment and decrease package size for dramatic reduction of packaging costs Discusses properties, preparation, and growth of silicon crystals and wafers Explains the many properties (mechanical, electrostatic, optical, etc), manufacturing, processing, measuring (incl. focused beam techniques), and multiscale modeling methods of MEMS structures

Handbook of Silicon Based MEMS Materials and Technologies

Handbook of Silicon Based MEMS Materials and Technologies
Author: Markku Tilli,Mervi Paulasto-Kröckel,Matthias Petzold,Horst Theuss,Teruaki Motooka,Veikko Lindroos
Publsiher: Elsevier
Total Pages: 1026
Release: 2020-04-17
ISBN 10: 012817787X
ISBN 13: 9780128177877
Language: EN, FR, DE, ES & NL

Handbook of Silicon Based MEMS Materials and Technologies Book Review:

Handbook of Silicon Based MEMS Materials and Technologies, Third Edition is a comprehensive guide to MEMS materials, technologies, and manufacturing with a particular emphasis on silicon as the most important starting material used in MEMS. The book explains the fundamentals, properties (mechanical, electrostatic, optical, etc.), materials selection, preparation, modeling, manufacturing, processing, system integration, measurement, and materials characterization techniques of MEMS structures. The third edition of this book provides an important up-to-date overview of the current and emerging technologies in MEMS making it a key reference for MEMS professionals, engineers, and researchers alike, and at the same time an essential education material for undergraduate and graduate students. Provides comprehensive overview of leading-edge MEMS manufacturing technologies through the supply chain from silicon ingot growth to device fabrication and integration with sensor/actuator controlling circuits Explains the properties, manufacturing, processing, measuring and modeling methods of MEMS structures Reviews the current and future options for hermetic encapsulation and introduces how to utilize wafer level packaging and 3D integration technologies for package cost reduction and performance improvements Geared towards practical applications presenting several modern MEMS devices including inertial sensors, microphones, pressure sensors and micromirrors

Developments in Surface Contamination and Cleaning Methods for Surface Cleaning

Developments in Surface Contamination and Cleaning  Methods for Surface Cleaning
Author: Rajiv Kohli,Kashmiri L. Mittal
Publsiher: William Andrew
Total Pages: 212
Release: 2016-11-04
ISBN 10: 0323431720
ISBN 13: 9780323431729
Language: EN, FR, DE, ES & NL

Developments in Surface Contamination and Cleaning Methods for Surface Cleaning Book Review:

Developments in Surface Contamination and Cleaning: Methods for Surface Cleaning, Volume 9, part of the Developments in Surface Contamination and Cleaning series provide a state-of-the-art guide to the current knowledge on the behavior of film-type and particulate surface contaminants and their associated cleaning methods. This newest volume in the series discusses methods of surface cleaning of contaminants and the resources that are needed to deal with them. Taken as a whole, the series forms a unique reference for professionals and academics working in the area of surface contamination and cleaning. A strong theme running through the series is that of surface contamination and cleaning at the micro and nano scales. Provides a comprehensive coverage of innovations in surface cleaning Written by established experts in the surface cleaning field, presenting an authoritative resource Contains a comprehensive review of the state-of-the-art, including case studies to enhance the learning process

Non wettable Surfaces

Non wettable Surfaces
Author: Robin H A Ras,Abraham Marmur
Publsiher: Royal Society of Chemistry
Total Pages: 391
Release: 2016-11-21
ISBN 10: 1782623957
ISBN 13: 9781782623953
Language: EN, FR, DE, ES & NL

Non wettable Surfaces Book Review:

The objective of this book is to integrate information about the theory, preparation and applications of non-wettable surfaces in one volume. By combining the discussion of all three aspects together the editors will show how theory assists the development of preparations methods and how these surfaces can be applied to different situations. The book is separated into three sections, first covering the theory, then going on to preparation of these surfaces and finally discussing the applications in detail. Edited by two of the most innovative contributors to the field of superhydrophobicity, this book will be essential reading for materials scientists interested in any aspect of surface, colloid and polymer science, thermodynamics, superhydrophobic and superhygrophobic surfaces.

Silicon Sensors and Actuators

Silicon Sensors and Actuators
Author: Benedetto Vigna,Paolo Ferrarini,Flavio Francesco Villa,Ernesto Lasalandra,Sarah Zerbini
Publsiher: Springer Nature
Total Pages: 997
Release: 2022-04-12
ISBN 10: 3030801357
ISBN 13: 9783030801359
Language: EN, FR, DE, ES & NL

Silicon Sensors and Actuators Book Review:

This book thoroughly reviews the present knowledge on silicon micromechanical transducers and addresses emerging and future technology challenges. Readers will acquire a solid theoretical and practical background that will allow them to analyze the key performance aspects of devices, critically judge a fabrication process, and then conceive and design new ones for future applications. Envisioning a future complex versatile microsystem, the authors take inspiration from Richard Feynman’s visionary talk “There is Plenty of Room at the Bottom” to propose that the time has come to see silicon sensors as part of a “Feynman Roadmap” instead of the “More-than-Moore” technology roadmap. The sharing of the author’s industrially proven track record of development, design, and manufacturing, along with their visionary approach to the technology, will allow readers to jump ahead in their understanding of the core of the topic in a very effective way. Students, researchers, engineers, and technologists involved in silicon-based sensor and actuator research and development will find a wealth of useful and groundbreaking information in this book.

MEMS Product Development

MEMS Product Development
Author: Alissa M. Fitzgerald,Carolyn D. White,Charles C. Chung
Publsiher: Springer Nature
Total Pages: 276
Release: 2021-04-17
ISBN 10: 3030617092
ISBN 13: 9783030617097
Language: EN, FR, DE, ES & NL

MEMS Product Development Book Review:

Drawing on their experiences in successfully executing hundreds of MEMS development projects, the authors present the first practical guide to navigating the technical and business challenges of MEMS product development, from the initial concept stage all the way to commercialization. The strategies and tactics presented, when practiced diligently, can shorten development timelines, help avoid common pitfalls, and improve the odds of success, especially when resources are limited. MEMS Product Development illuminates what it really takes to develop a novel MEMS product so that innovators, designers, entrepreneurs, product managers, investors, and executives may properly prepare their companies to succeed.

Flexible Sensors for Energy Harvesting Applications

Flexible Sensors for Energy Harvesting Applications
Author: Anindya Nag
Publsiher: Springer Nature
Total Pages: 135
Release: 2022
ISBN 10: 303099600X
ISBN 13: 9783030996000
Language: EN, FR, DE, ES & NL

Flexible Sensors for Energy Harvesting Applications Book Review:

Polymers in Organic Electronics

Polymers in Organic Electronics
Author: Sulaiman Khalifeh
Publsiher: Elsevier
Total Pages: 616
Release: 2020-04-01
ISBN 10: 192788568X
ISBN 13: 9781927885680
Language: EN, FR, DE, ES & NL

Polymers in Organic Electronics Book Review:

Polymers in Organic Electronics: Polymer Selection for Electronic, Mechatronic, and Optoelectronic Systems provides readers with vital data, guidelines, and techniques for optimally designing organic electronic systems using novel polymers. The book classifies polymer families, types, complexes, composites, nanocomposites, compounds, and small molecules while also providing an introduction to the fundamental principles of polymers and electronics. Features information on concepts and optimized types of electronics and a classification system of electronic polymers, including piezoelectric and pyroelectric, optoelectronic, mechatronic, organic electronic complexes, and more. The book is designed to help readers select the optimized material for structuring their organic electronic system. Chapters discuss the most common properties of electronic polymers, methods of optimization, and polymeric-structured printed circuit boards. The polymeric structures of optoelectronics and photonics are covered and the book concludes with a chapter emphasizing the importance of polymeric structures for packaging of electronic devices. Provides key identifying details on a range of polymers, micro-polymers, nano-polymers, resins, hydrocarbons, and oligomers Covers the most common electrical, electronic, and optical properties of electronic polymers Describes the underlying theories on the mechanics of polymer conductivity Discusses polymeric structured printed circuit boards, including their rapid prototyping and optimizing their polymeric structures Shows optimization methods for both polymeric structures of organic active electronic components and organic passive electronic components

Comprehensive Materials Processing

Comprehensive Materials Processing
Author: Anonim
Publsiher: Newnes
Total Pages: 5634
Release: 2014-04-07
ISBN 10: 0080965334
ISBN 13: 9780080965338
Language: EN, FR, DE, ES & NL

Comprehensive Materials Processing Book Review:

Comprehensive Materials Processing provides students and professionals with a one-stop resource consolidating and enhancing the literature of the materials processing and manufacturing universe. It provides authoritative analysis of all processes, technologies, and techniques for converting industrial materials from a raw state into finished parts or products. Assisting scientists and engineers in the selection, design, and use of materials, whether in the lab or in industry, it matches the adaptive complexity of emergent materials and processing technologies. Extensive traditional article-level academic discussion of core theories and applications is supplemented by applied case studies and advanced multimedia features. Coverage encompasses the general categories of solidification, powder, deposition, and deformation processing, and includes discussion on plant and tool design, analysis and characterization of processing techniques, high-temperatures studies, and the influence of process scale on component characteristics and behavior. Authored and reviewed by world-class academic and industrial specialists in each subject field Practical tools such as integrated case studies, user-defined process schemata, and multimedia modeling and functionality Maximizes research efficiency by collating the most important and established information in one place with integrated applets linking to relevant outside sources

Advanced Functional Materials and Devices

Advanced Functional Materials and Devices
Author: Saluru Baba Krupanidhi,Vinay Gupta,Anjali Sharma Kaushik,Anjani Kumar Singh
Publsiher: Springer Nature
Total Pages: 299
Release: 2022-01-05
ISBN 10: 9811659710
ISBN 13: 9789811659713
Language: EN, FR, DE, ES & NL

Advanced Functional Materials and Devices Book Review:

This book presents the select proceedings of the International Conference on Advanced Functional Materials and Devices (AFMD 2021). It highlights the advancements in area of functional materials which includes electronic, magnetic, optical, adaptive and dielectric materials that are required to develop new functionalities with better performance in this new era of technology. The topics covered include materials for energy harvesting, biomedical applications, environmental monitoring, photonics and optoelectronic devices, strategic applications and high energy physics. This book will be a useful reference for beginners, researchers, academicians and professionals working in the area of material science and its allied fields.

Micro and Nano Fabrication by Metal Assisted Chemical Etching

Micro  and Nano Fabrication by Metal Assisted Chemical Etching
Author: Lucia Romano
Publsiher: MDPI
Total Pages: 106
Release: 2021-01-13
ISBN 10: 303943845X
ISBN 13: 9783039438457
Language: EN, FR, DE, ES & NL

Micro and Nano Fabrication by Metal Assisted Chemical Etching Book Review:

Metal-assisted chemical etching (MacEtch) has recently emerged as a new etching technique capable of fabricating high aspect ratio nano- and microstructures in a few semiconductors substrates—Si, Ge, poly-Si, GaAs, and SiC—and using different catalysts—Ag, Au, Pt, Pd, Cu, Ni, and Rh. Several shapes have been demonstrated with a high anisotropy and feature size in the nanoscale—nanoporous films, nanowires, 3D objects, and trenches, which are useful components of photonic devices, microfluidic devices, bio-medical devices, batteries, Vias, MEMS, X-ray optics, etc. With no limitations of large-areas and low-cost processing, MacEtch can open up new opportunities for several applications where high precision nano- and microfabrication is required. This can make semiconductor manufacturing more accessible to researchers in various fields, and accelerate innovation in electronics, bio-medical engineering, energy, and photonics. Accordingly, this Special Issue seeks to showcase research papers, short communications, and review articles that focus on novel methodological developments in MacEtch, and its use for various applications.

Advanced Materials Research Vol 1170

Advanced Materials Research Vol  1170
Author: Alan Kin Tak Lau
Publsiher: Trans Tech Publications Ltd
Total Pages: 178
Release: 2022-04-19
ISBN 10: 3036410457
ISBN 13: 9783036410456
Language: EN, FR, DE, ES & NL

Advanced Materials Research Vol 1170 Book Review:

This volume of the "Advanced Materials Research" journal includes papers reflecting research results in developing new materials and investigating their properties. The covered topics comprise assessment of the algorithm of surface defect classification in silicon wafer manufacturing, designing and simulation of a color-tunable light-emitting diode with two laterally arranged single quantum wells, defect evolution in laser remelting of thermally sprayed coating, analysis of corrosion behavior of welded joint aluminum alloy in simulated marine atmosphere environment, results of an experimental study into thermal behavior of micro friction stir welded joints of aluminum and copper sheets. Some articles demonstrate the review of mechanical properties of foamed cellular concrete and fire retardant materials, the study of properties of materials that are based on the natural fiber, and analysis of technologies of surface water treatment and absorption of various pharmaceutical compounds. The papers collected in this volume will be helpful for professionals in various engineering fields, students, and academic staff.

MEMS Lorentz Force Magnetometers

MEMS Lorentz Force Magnetometers
Author: Cesare Buffa
Publsiher: Springer
Total Pages: 128
Release: 2017-07-04
ISBN 10: 3319594125
ISBN 13: 9783319594125
Language: EN, FR, DE, ES & NL

MEMS Lorentz Force Magnetometers Book Review:

This book deals with compasses for consumer applications realized in MEMS technology, to support location-based and orientation-based services in addition to ‘traditional’ functionalities based on navigation. Navigation is becoming a must-have feature in portable devices and the presence of a compass also makes location-based augmented reality emerge, where a street map or a camera image could be overlaid with highly detailed information about what is in front of the user. To make these features possible both industries and scientific research focus on three axis magnetometers. The author describes a full path from specifications (driven by customers’ needs/desires) to prototype and preparing the way to industrialization and commercialization. The presentation includes an overview of all the major steps of this research and development process, highlighting critical points and potential pitfalls, as well as how to forecast or mitigate them. Coverage includes system design, specifications fulfillment, design strategy and project development methodology, in addition to traditional topics such as microelectronics design, sensor design, development of an experimental setup and characterization. The author uses a practical approach, including pragmatic guidelines and design choices, while maintaining focus on the final target, prototyping in the direction of industrialization and mass production.

Emerging Nanotechnologies in Dentistry

Emerging Nanotechnologies in Dentistry
Author: Karthikeyan Subramani,Waqar Ahmed
Publsiher: William Andrew
Total Pages: 410
Release: 2012
ISBN 10: 1455778621
ISBN 13: 9781455778621
Language: EN, FR, DE, ES & NL

Emerging Nanotechnologies in Dentistry Book Review:

Nanotechnology and the future of Dentistry -- Nanoparticles for Dental Materials: Synthesis, analysis and Applications -- Antimicrobial nanoparticles in Restorative Composites -- Nanotechnology in operative dentistry: a perspective approach of history, mechanical behavior and clinical application -- Nanotechnology and dental implants -- Titanium surface modification techniques for dental implants - From microscale to nanoscale -- Titanium nanotubes as carriers of osteogenic growth factors and antibacterial drugs for applications in dental implantology -- Cellular responses to nanoscale surface modifications of titanium implants for dentistry and bone tissue engineering applications -- Corrosion Resistance of Ti6Al4V with Nanostructured TiO2 Coatings -- Multiwalled Carbon Nanotubes/Hydroxyapatite Nanoparticles incorporated GTR membranes -- Fabrication of PEG hydrogel micropatterns by Soft-photolithography and PEG hydrogel as Guided Bone Regeneration membrane in dental implantology -- Na ...

Modern Trends in Materials Processing

Modern Trends in Materials Processing
Author: Sergey Bratan,Stanislav Roshchupkin
Publsiher: Trans Tech Publications Ltd
Total Pages: 1184
Release: 2022-02-15
ISBN 10: 3035721491
ISBN 13: 9783035721492
Language: EN, FR, DE, ES & NL

Modern Trends in Materials Processing Book Review:

Selected peer-reviewed full text papers from the 5th International Conference on Modern Trends in Manufacturing Technologies and Equipment (ICMTMTE 2021)

MEMS Materials and Processes Handbook

MEMS Materials and Processes Handbook
Author: Reza Ghodssi,Pinyen Lin
Publsiher: Springer Science & Business Media
Total Pages: 1188
Release: 2011-03-18
ISBN 10: 0387473181
ISBN 13: 9780387473185
Language: EN, FR, DE, ES & NL

MEMS Materials and Processes Handbook Book Review:

MEMs Materials and Processes Handbook" is a comprehensive reference for researchers searching for new materials, properties of known materials, or specific processes available for MEMS fabrication. The content is separated into distinct sections on "Materials" and "Processes". The extensive Material Selection Guide" and a "Material Database" guides the reader through the selection of appropriate materials for the required task at hand. The "Processes" section of the book is organized as a catalog of various microfabrication processes, each with a brief introduction to the technology, as well as examples of common uses in MEMs.

Introduction to Microelectronics to Nanoelectronics

Introduction to Microelectronics to Nanoelectronics
Author: Manoj Kumar Majumder,Vijay Rao Kumbhare,Aditya Japa,Brajesh Kumar Kaushik
Publsiher: CRC Press
Total Pages: 328
Release: 2020-11-25
ISBN 10: 1000223094
ISBN 13: 9781000223095
Language: EN, FR, DE, ES & NL

Introduction to Microelectronics to Nanoelectronics Book Review:

Focussing on micro- and nanoelectronics design and technology, this book provides thorough analysis and demonstration, starting from semiconductor devices to VLSI fabrication, designing (analog and digital), on-chip interconnect modeling culminating with emerging non-silicon/ nano devices. It gives detailed description of both theoretical as well as industry standard HSPICE, Verilog, Cadence simulation based real-time modeling approach with focus on fabrication of bulk and nano-devices. Each chapter of this proposed title starts with a brief introduction of the presented topic and ends with a summary indicating the futuristic aspect including practice questions. Aimed at researchers and senior undergraduate/graduate students in electrical and electronics engineering, microelectronics, nanoelectronics and nanotechnology, this book: Provides broad and comprehensive coverage from Microelectronics to Nanoelectronics including design in analog and digital electronics. Includes HDL, and VLSI design going into the nanoelectronics arena. Discusses devices, circuit analysis, design methodology, and real-time simulation based on industry standard HSPICE tool. Explores emerging devices such as FinFETs, Tunnel FETs (TFETs) and CNTFETs including their circuit co-designing. Covers real time illustration using industry standard Verilog, Cadence and Synopsys simulations.

Semiconductor Manufacturing Handbook Second Edition

Semiconductor Manufacturing Handbook  Second Edition
Author: Hwaiyu Geng
Publsiher: McGraw Hill Professional
Total Pages: 704
Release: 2017-10-06
ISBN 10: 1259583120
ISBN 13: 9781259583124
Language: EN, FR, DE, ES & NL

Semiconductor Manufacturing Handbook Second Edition Book Review:

Thoroughly Revised, State-of-the-Art Semiconductor Design, Manufacturing, and Operations Information Written by 70 international experts and reviewed by a seasoned technical advisory board, this fully updated resource clearly explains the cutting-edge processes used in the design and fabrication of IC chips, MEMS, sensors, and other electronic devices. Semiconductor Manufacturing Handbook, Second Edition, covers the emerging technologies that enable the Internet of Things, the Industrial Internet of Things, data analytics, artificial intelligence, augmented reality, and and smart manufacturing. You will get complete details on semiconductor fundamentals, front- and back-end processes, nanotechnology, photovoltaics, gases and chemicals, fab yield, and operations and facilities. •Nanotechnology and microsystems manufacturing •FinFET and nanoscale silicide formation •Physical design for high-performance, low-power 3D circuits •Epitaxi, anneals, RTP, and oxidation •Microlithography, etching, and ion implantations •Physical, chemical, electrochemical, and atomic layer vapor deposition •Chemical mechanical planarization •Atomic force metrology •Packaging, bonding, and interconnects •Flexible hybrid electronics •Flat-panel,flexible display electronics, and photovoltaics •Gas distribution systems •Ultrapure water and filtration •Process chemicals handling and abatement •Chemical and slurry handling systems •Yield management, CIM, and factory automation •Manufacturing execution systems •Advanced process control •Airborne molecular contamination •ESD controls in clean-room environments •Vacuum systems and RF plasma systems •IC manufacturing parts cleaning technology •Vibration and noise design •And much more

Handbook of Research on Solar Energy Systems and Technologies

Handbook of Research on Solar Energy Systems and Technologies
Author: Anwar, Sohail
Publsiher: IGI Global
Total Pages: 614
Release: 2012-08-31
ISBN 10: 146661997X
ISBN 13: 9781466619975
Language: EN, FR, DE, ES & NL

Handbook of Research on Solar Energy Systems and Technologies Book Review:

The last ten years have seen rapid advances in nanoscience and nanotechnology, allowing unprecedented manipulation of the nanoscale structures controlling solar capture, conversion, and storage. Filled with cutting-edge solar energy research and reference materials, the Handbook of Research on Solar Energy Systems and Technologies serves as a one-stop resource for the latest information regarding different topical areas within solar energy. This handbook will emphasize the application of nanotechnology innovations to solar energy technologies, explore current and future developments in third generation solar cells, and provide a detailed economic analysis of solar energy applications.

Silicon Heterostructure Handbook

Silicon Heterostructure Handbook
Author: John D. Cressler
Publsiher: CRC Press
Total Pages: 1248
Release: 2018-10-03
ISBN 10: 1420026585
ISBN 13: 9781420026580
Language: EN, FR, DE, ES & NL

Silicon Heterostructure Handbook Book Review:

An extraordinary combination of material science, manufacturing processes, and innovative thinking spurred the development of SiGe heterojunction devices that offer a wide array of functions, unprecedented levels of performance, and low manufacturing costs. While there are many books on specific aspects of Si heterostructures, the Silicon Heterostructure Handbook: Materials, Fabrication, Devices, Circuits, and Applications of SiGe and Si Strained-Layer Epitaxy is the first book to bring all aspects together in a single source. Featuring broad, comprehensive, and in-depth discussion, this handbook distills the current state of the field in areas ranging from materials to fabrication, devices, CAD, circuits, and applications. The editor includes "snapshots" of the industrial state-of-the-art for devices and circuits, presenting a novel perspective for comparing the present status with future directions in the field. With each chapter contributed by expert authors from leading industrial and research institutions worldwide, the book is unequalled not only in breadth of scope, but also in depth of coverage, timeliness of results, and authority of references. It also includes a foreword by Dr. Bernard S. Meyerson, a pioneer in SiGe technology. Containing nearly 1000 figures along with valuable appendices, the Silicon Heterostructure Handbook authoritatively surveys materials, fabrication, device physics, transistor optimization, optoelectronics components, measurement, compact modeling, circuit design, and device simulation.