Fabrication and Design of Resonant Microdevices

This book discusses the main issues of fabrication and design, and applications of micromachined resonant devices, including techniques commonly used for processing the output signal of resonant micro-electro-mechanical systems (MEMS). Concepts of resonance are introduced, with an overview of fabrication techniques for micromachined devices – important to understand as design options will depend on how the device will be fabricated. Also explained: excitation and signal detection methods; an analytic model of device behavior (a valuable design tool); numerical simulation techniques; issues of damping and noise for resonant MEMS; electronic interfacing; packaging issues; and numerous examples of resonant MEMS from academia and industry. Offers numerous academic and industrial examples of resonant MEMS Provides an analytic model of device behaviour Explains two-port systems in detail Devotes ample space to excitation and signal detection methods Covers issues of damping and noise for resonant MEMS, two topics of particular importance for high-Q devices

This book discusses the main issues of fabrication and design, and applications of micromachined resonant devices, including techniques commonly used for processing the output signal of resonant micro-electro-mechanical systems (MEMS). Concepts of resonance are introduced, with an overview of fabrication techniques for micromachined devices – important to understand as design options will depend on how the device will be fabricated. Also explained: excitation and signal detection methods; an analytic model of device behavior (a valuable design tool); numerical simulation techniques; issues of damping and noise for resonant MEMS; electronic interfacing; packaging issues; and numerous examples of resonant MEMS from academia and industry. Offers numerous academic and industrial examples of resonant MEMS Provides an analytic model of device behaviour Explains two-port systems in detail Devotes ample space to excitation and signal detection methods Covers issues of damping and noise for resonant MEMS, two topics of particular importance for high-Q devices

Nanotechnology is a technology on the verge of commercialization. In this important work, an unrivalled team of international experts provides an exploration of the emerging nanotechnologies that are poised to make the nano-revolution a reality in the manufacturing sector. From their different perspectives, the contributors explore how developments in nanotechnology are transforming areas as diverse as medicine, advanced materials, energy, electronics and agriculture. Key topics covered include: Characterization of nanostructures Bionanotechnology Nanoelectronics Micro- and nanomachining Self-assembly techniques New applications of carbon nanotubes Environmental and health impacts This book provides an important and in-depth guide to the applications and impact of nanotechnology to different manufacturing sectors. As such, it will find a broad readership, from R&D scientists and engineers to venture capitalists. About the Authors Waqar Ahmed is Chair of Nanotechnology & Advanced Manufacturing and the Director of the Institute of Advanced Manufacturing and Innovation at the University of Central Lancashire, UK. He has contributed to the wider industrial adoption of surface coating solutions through fundamental research and modeling of gas phase processes in CVD and studies of tribological behavior. Mark J. Jackson is a Professor at the Birck Nanotechnology Center and Center for Advanced Manufacturing, College of Technology at Purdue University. Dr Jackson is active in research work concerned with understanding the properties of materials in the field of microscale metal cutting, micro- and nanoabrasive machining, and laser micromachining. He is also involved in developing next generation manufacturing processes and biomedical engineering. • Explains how to use biological pathways to produce nanoelectric devices • Presents data on new, experimental designs • Discusses the history of carbon nanotubes and how they are synthesized to fabricate novel nanostructures (incl. data on laser ablation) • Extensive use of illustrations, tables, and figures throughout

The World Health Organization in 2004 estimated approximately 1.1 billion people did not have access to clean water and that 35% of Third World residents died from water-borne illnesses. While the situation is grim, recent advances strongly indicate that many of the current water quality problems can be addresses – and potentially resolved – using nanotechnology. Nanotechnology is already having a dramatic impact on research in water quality and Nanotechnology Applications for Clean Water highlights both the challenges and the opportunities for nanotechnology to positively influence this area of environmental protection. Here you will find detailed information on breakthroughs, cutting edge technologies, current research, and future trends that may affect acceptance of widespread applications. The first four parts of the book cover specific topics including using nanotechnology for clean drinking water in both large scale water treatment plants and in point-of-use systems. For instance, recent advances show that many of the current problems involving water quality can be addressed using nanosorbents, nanocatalysts, bioactive nanoparticles, nanostructured catalytic membranes, and nanoparticle enhanced filtration. The book also discusses existing technologies and future potential for groundwater remediation, pollution prevention, and sensors. The final part discusses the inherent societal implications that may affect acceptance of widespread applications. Over 80 leading experts from around the world share their wealth of knowledge in this truly unique reference. Institutions such as Center for the Purification of Water and Systems (Univ. of Illinois at Urbana-Champaign); UCLA Water Technology Center; Carnegie Mellon University, University of Kentucky; The University of Western Ontario; Pacific Northwest National Laboratory; National Institute for Advanced Industrial Science and Technology (Japan), Munasinghe Institute for Development (Sri Lanka) and the Woodrow Wilson Center for Scholars are just a few of the knowledge centers represented in this book. Water quality is a serious, global issue in which government bodies and scientific communities face many challenges in ensuring clean water is available to everyone. Nanotechnology is already showing dramatic results, and this book is an attempt to share current technologies and future possibilities in reaching this goal. From the Foreword: "Researchers and practitioners may find in this volume, key challenges regarding clean water resources. The presentations may crystallize new research and education programs." - Mihail Roco, U.S. National Science Foundation and U.S. Nanotechnology Initiative • Contributors from the US, India, Canada, Japan, UK, Sri Lanka, and South Africa • Provides detailed information on breakthroughs, cutting edge technologies, current research, and future trends that may affect acceptance of widespread applications • Covers specific topics including using nanotechnology for clean drinking water in both large scale water treatment plants and in point-of-use systems. • Discusses existing technologies and future potential for groundwater remediation, pollution prevention, and sensors • Highlights both the challenges and the opportunities for nanotechnology to positively influence this area of environmental protection.

This book tackles the debate over nanotechnology's environmental health and safety (EHS) by thoroughly explaining EHS issues, financial implications, foreseeable risks (i.e. exposure, dose, hazards of nanomaterials), and the implications of occupational hygiene precautions and consumer protections. Real-world case studies are included, e.g. the discussion of a leading chemical company's unusual pairing with the USA's largest environmental NGO, and an innovative program designed for small- to mid-sized businesses, which became a model approach for proactive nanotechnology EHS risk management. Considers the potential of nanotechnology from multiple perspectives (NGO, insurance industry, small business, etc) Provides guidance and advice for appropriate, proactive risk management strategies Reviews toxicological studies and industrial initiatives, documented with actual case studies Of significant interest to CEOs/CTOs of technology companies (SMEs), Health and Safety officers of technology companies (SMEs), Government officials (HSE), Toxicology experts, and venture capitalists

This book focuses on the industrial perspective for micro- and nanofabrication methods including large-scale manufacturing, transfer of concepts from lab to factory, process tolerance, yield, robustness, and cost. It gives a history of miniaturization, micro- and nanofabrication, and surveys industrial fields of application, illustrating fabrication processes of relevant micro and nano devices. Concerning sub-micron feature manufacture, the book explains: the philosophy of micro/ nanofabrication for integrated circuit industry; thin film deposition; (waveguide, plastic, semiconductor) material processing; packaging; interconnects; stress (e.g., thin film residual); economic; and environmental aspects. Micro/nanomechanical sensors and actuators are explained in depth with information on applications, materials (incl. functional polymers), methods, testing, fabrication, integration, reliability, magnetic microstructures, etc. • Shows engineers & students how to evaluate the potential value of current and nearfuture manufacturing processes for miniaturized systems in industrial environments • Explains the top-down and bottom up approaches to nanotechnology, nanostructures fabricated with beams, nano imprinting methods, nanoparticle manufacturing (and their health aspects), nanofeature analysis, and connecting nano to micro to macro • Discusses issues for practical application cases; possibilities of dimension precision; large volume manufacturing of micro- & nanostructures (machines, materials, costs) • Explains applications of Microsystems for information technology, e.g.: data recording (camera, microphone), storage (memories, CDs), communication; computing; and displays (beamers, LCD, TFT) • Case studies are given for sensors, resonators, probes, transdermal medical systems, micro- pumps & valves, inkjets, DNA-analysis, lab-on-a-chip, & micro-cooling

Offering a practical look into the field, this volume presents the science behind microscale device design and the engineering of its fabrication. Supported with dozens of full-color illustrations, this book offers you clear, step-by-step methods for the cell capture from whole blood, high-throughput study of transcriptional dynamics in living cells, temporal control of cell-cell interaction, nanoscale measurements of cellular forces, immobilizing living c. elegans, optical and electrical on-chip cell sorting and human-on-chip modeling of drug metabolism.

Micro mechatronics technology is a field of great promise as one of ultimate resource & energy conservation. The advances in techniques & experimental applications described in this international symposium herald a new generation of products, improvement in the quality of life, & development of economic & business opportunities. Also discussed is the development of implantable micro-systems for medical & biological reasons. Partial Contents: Micro Mechatronics & Fabrication Technology; Micro Assembly Technology; Nano Technology; Micro Sensors & Actuators; Micro Robotics; Artificial Life; Swarm Intelligence; Virtual Reality

Acoustics is a mature field which enjoys a never ending youth. New developments are induced by either the search for a better understanding, or by technological innovations. Micro-fabrication techniques introduced a whole new class of microdevices, which exploit acoustic waves for various tasks, and in particular for information processing and for sensing purposes. Performance improvements are achievable by better modelling tools, able to deal with more complex configurations, and by more refined techniques of fabrication and of integration in technological systems, like wireless communications. Several chapters of this book deal with modelling and fabrication techniques for microdevices, including unconventional phenomena and configurations. But this is far from exhausting the research lines in acoustics. Theoretical analyses and modelling techniques are presented, for phenomena ranging from the detection of cracks to the acoustics of the oceans. Measurement methods are also discussed, which probe by acoustic waves the properties of widely different systems.

Issues in Biomedical Engineering Research and Application: 2011 Edition is a ScholarlyEditions™ eBook that delivers timely, authoritative, and comprehensive information about Biomedical Engineering Research and Application. The editors have built Issues in Biomedical Engineering Research and Application: 2011 Edition on the vast information databases of ScholarlyNews.™ You can expect the information about Biomedical Engineering Research and Application in this eBook to be deeper than what you can access anywhere else, as well as consistently reliable, authoritative, informed, and relevant. The content of Issues in Biomedical Engineering Research and Application: 2011 Edition has been produced by the world’s leading scientists, engineers, analysts, research institutions, and companies. All of the content is from peer-reviewed sources, and all of it is written, assembled, and edited by the editors at ScholarlyEditions™ and available exclusively from us. You now have a source you can cite with authority, confidence, and credibility. More information is available at http://www.ScholarlyEditions.com/.

Sensors and actuators are now part of our everyday life and appear in many appliances, such as cars, vending machines and washing machines. MEMS (Micro Electro Mechanical Systems) are micro systems consisting of micro mechanical sensors, actuators and micro electronic circuits. A variety of MEMS devices have been developed and many mass produced, but the information on these is widely dispersed in the literature. This book presents the analysis and design principles of MEMS devices. The information is comprehensive, focusing on microdynamics, such as the mechanics of beam and diaphragm structures, air damping and its effect on the motion of mechanical structures. Using practical examples, the author examines problems associated with analysis and design, and solutions are included at the back of the book. The ideal advanced level textbook for graduates, Analysis and Design Principles of MEMS Devices is a suitable source of reference for researchers and engineers in the field. * Presents the analysis and design principles of MEMS devices more systematically than ever before. * Includes the theories essential for the analysis and design of MEMS includes the dynamics of micro mechanical structures * A problem section is included at the end of each chapter with answers provided at the end of the book.