Advanced Surface Metrology for Micro- & Nanofabrication

This book is a comprehensive treatment of micro and nanofabrication techniques, and applies established and research laboratory manufacturing techniques to a wide variety of materials. It is a companion volume to “Micro and Nanomanufacturing” (2007) and covers new topics such as aligned nanowire growth, molecular dynamics simulation of nanomaterials, atomic force microscopy for microbial cell surfaces, 3D printing of pharmaceuticals, microvascular coaptation methods, and more. The chapters also cover a wide variety of applications in areas such as surgery, auto components, living cell detection, dentistry, nanoparticles in medicine, and aerospace components. This is an ideal text for professionals working in the field, and for graduate students in micro and nanomanufacturing courses.

For the promotion of global trading and the reduction of potential risks, the role of international standardization of nanotechnologies has become more and more important. This book gives an overview of the current status of nanotechnology including the importance of metrology and characterization at the nanoscale, international standardization of nanotechnology, and industrial innovation of nano-enabled products. First the field of nanometrology, nanomaterial standardization and nanomaterial innovation is introduced. Second, major concepts in analytical measurements are given in order to provide a basis for the reliable and reproducible characterization of nanomaterials. The role of standards organizations are presented and finally, an overview of risk management and the commercial impact of metrology and standardization for industrial innovations.

This volume presents a comprehensive perspective on the global scientific, technological, and societal impact of nanotechnology since 2000, and explores the opportunities and research directions in the next decade to 2020. The vision for the future of nanotechnology presented here draws on scientific insights from U.S. experts in the field, examinations of lessons learned, and international perspectives shared by participants from 35 countries in a series of high-level workshops organized by Mike Roco of the National Science Foundation (NSF), along with a team of American co-hosts that includes Chad Mirkin, Mark Hersam, Evelyn Hu, and several other eminent U.S. scientists. The study performed in support of the U.S. National Nanotechnology Initiative (NNI) aims to redefine the R&D goals for nanoscale science and engineering integration and to establish nanotechnology as a general-purpose technology in the next decade. It intends to provide decision makers in academia, industry, and government with a nanotechnology community perspective of productive and responsible paths forward for nanotechnology R&D.

Volume is indexed by Thomson Reuters CPCI-S (WoS). The present volumes contain selected papers on the fields of precision engineering - including precision/ultra-precision machining, non-traditional machining, manufacturing systems and machine tools, nano and micro metrology and surface characterization, MEMS/NEMS, advanced moulding and forming, high-precision mechatronics and other technologies which are associated with micro/nano manufacturing. The work provides up-to-date and comprehensive coverage of the progress being made world wide.

Working at the nano-scale demands an understanding of the high-precision measurement techniques that make nanotechnology and advanced manufacturing possible. Richard Leach introduces these techniques to a broad audience of engineers and scientists involved in nanotechnology and manufacturing applications and research. He also provides a routemap and toolkit for metrologists engaging with the rigor of measurement and data analysis at the nano-scale. Starting from the fundamentals of precision measurement, the author progresses into different measurement and characterization techniques. The focus on nanometrology in engineering contexts makes this book an essential guide for the emerging nanomanufacturing / nanofabrication sector, where measurement and standardization requirements are paramount both in product specification and quality assurance. This book provides engineers and scientists with the methods and understanding needed to design and produce high-performance, long-lived products while ensuring that compliance and public health requirements are met. Updated to cover new and emerging technologies, and recent developments in standards and regulatory frameworks, this second edition includes many new sections, e.g. new technologies in scanning probe and e-beam microscopy, recent developments in interferometry and advances in co-ordinate metrology. Demystifies nanometrology for a wide audience of engineers, scientists, and students involved in nanotech and advanced manufacturing applications and research Introduces metrologists to the specific techniques and equipment involved in measuring at the nano-scale or to nano-scale uncertainty Fully updated to cover the latest technological developments, standards, and regulations

Precision Nanometrology describes the new field of precision nanometrology, which plays an important part in nanoscale manufacturing of semiconductors, optical elements, precision parts and similar items. It pays particular attention to the measurement of surface forms of precision workpieces and to stage motions of precision machines. The first half of the book is dedicated to the description of optical sensors for the measurement of angle and displacement, which are fundamental quantities for precision nanometrology. The second half presents a number of scanning-type measuring systems for surface forms and stage motions. The systems discussed include: • error separation algorithms and systems for measurement of straightness and roundness, • the measurement of micro-aspherics, • systems based on scanning probe microscopy, and • scanning image-sensor systems. Precision Nanometrology presents the fundamental and practical technologies of precision nanometrology with a helpful selection of algorithms, instruments and experimental data. It will be beneficial for researchers, engineers and postgraduate students involved in precision engineering, nanotechnology and manufacturing.

A fully comprehensive examination of state-of-the-art technologies for measurement at the small scale • Highlights the advanced research work from industry and academia in micro-nano devices test technology • Written at both introductory and advanced levels, provides the fundamentals and theories • Focuses on the measurement techniques for characterizing MEMS/NEMS devices

This book presents applicable knowledge of technology, equipment and applications, and the core economic issues of micromanufacturing for anyone with a basic understanding of manufacturing, material, or product engineering. It explains micro-engineering issues (design, systems, materials, market and industrial development), technologies, facilities, organization, competitiveness, and innovation with an analysis of future potential. The machining, forming, and joining of miniature / micro-products are all covered in depth, covering: grinding/milling, laser applications, and photo chemical etching; embossing (hot & UV), injection molding and forming (bulk, sheet, hydro, laser); mechanical assembly, laser joining, soldering, and packaging. • Presents case studies, material and design considerations, working principles, process configurations, and information on tools, equipment, parameters and control • Explains the many facets of recently emerging additive / hybrid technologies and systems, incl: photo-electric-forming, liga, surface treatment, and thin film fabrication • Outlines system engineering issues pertaining to handling, metrology, testing, integration & software • Explains widely used micro parts in bio / medical industry, information technology and automotive engineering. • Covers technologies in high demand, such as: micro-mechanical-cutting, lasermachining, micro-forming, micro-EDM, micro-joining, photo-chemical-etching, photo-electro-forming, and micro-packaging

Provides researchers and practitioners with the technical background to understand transport phenomena in laser microfabrication applications.

Selected, peer reviewed papers from the International Conference on Nanotechnology and Precision Engineering (ICNPE 2012), December 18-19, 2012, Guangzhou, China

Contributions from engineers, physicists, biologists, chemists and materials scientists are collected in this volume. The science of nanoscale engineering and manufacturing and the expanding range of applications of this science are discussed

Volume is indexed by Thomson Reuters CPCI-S (WoS). The volume contains selected, peer reviewed papers from the 2012 International Conference on Biochemical Materials and Nanotechnology Application (BMNA2012), December 22-23, 2012, Yichang, China. The papers are grouped as follows: Chapter 1: Bio-, Chemical, Food Materials, Material Engineering and Technology; Chapter 2: Nanomaterials and Nanotechnology.

Volume is indexed by Thomson Reuters CPCI-S (WoS). These are the proceedings of the International Conference on Nanotechnology Technology and Advanced Materials (ICNTAM 2012), held on 12-13th April 2012 in Hong Kong. They are divided into three sections. The first deals with Nanotechnology Technology. The second covers materials science and the third treats the use of manufacturing technology.

Volume is indexed by Thomson Reuters BCI (WoS). Measurement, rigorously defined as ‘ascertaining the size, amount or degree of a measurand by instrumental comparison with a standard unit or by indirect calculation based upon theory’, is what makes science and technology different to imagination. Measurement is essential in industry, commerce and daily life. In the manufacturing industry in particular, measurement and instrumentation technology play increasingly important roles not only in the traditional field of manufacturing but also in the new fields of micro/nano technology and bioengineering. This book presents recent advances in the use of measurement and instrumentation in the manufacturing industry. A wide range of topics are covered including: micro/nano-metrology,precision measurements,online and in-process measurements,surface metrology,optical metrology and image processing,bio-measurement, sensor technology,intelligent measurement and instrumentation,uncertainty, traceability and calibration and signal-processing algorithms.

MEMS and Nanotechnology, Volume 4 represents one of eight volumes of technical papers presented at the Society for Experimental Mechanics Annual Conference on Experimental and Applied Mechanics, held at Uncasville, Connecticut, June 13-16, 2011. The full set of proceedings also includes volumes on Dynamic Behavior of Materials, Mechanics of Biological Systems and Materials, Mechanics of Time-Dependent Materials and Processes in Conventional and Multifunctional Materials; Optical Measurements, Modeling and, Metrology; Experimental and Applied Mechanics, Thermomechanics and Infra-Red Imaging, and Engineering Applications of Residual Stress.

As the characteristic dimensions of electronic devices continue to shrink, the ability to characterize their electronic properties at the nanometer scale has come to be of outstanding importance. In this sense, Scanning Probe Microscopy (SPM) is becoming an indispensable tool, playing a key role in nanoscience and nanotechnology. SPM is opening new opportunities to measure semiconductor electronic properties with unprecedented spatial resolution. SPM is being successfully applied for nanoscale characterization of ferroelectric thin films. In the area of functional molecular materials it is being used as a probe to contact molecular structures in order to characterize their electrical properties, as a manipulator to assemble nanoparticles and nanotubes into simple devices, and as a tool to pattern molecular nanostructures. This book provides in-depth information on new and emerging applications of SPM to the field of materials science, namely in the areas of characterisation, device application and nanofabrication of functional materials. Starting with the general properties of functional materials the authors present an updated overview of the fundamentals of Scanning Probe Techniques and the application of SPM techniques to the characterization of specified functional materials such as piezoelectric and ferroelectric and to the fabrication of some nano electronic devices. Its uniqueness is in the combination of the fundamental nanoscale research with the progress in fabrication of realistic nanodevices. By bringing together the contribution of leading researchers from the materials science and SPM communities, relevant information is conveyed that allows researchers to learn more about the actual developments in SPM applied to functional materials. This book will contribute to the continuous education and development in the field of nanotechnology.

Increased demand for and developments in micromanufacturing have created a need for a resource that covers both the science and technology of this rapidly growing area. With contributions from eminent professors and researchers actively engaged in teaching, research, and development, Micromanufacturing Processes details the basic principles, tools,

Atomic force microscopes are very important tools for the advancement of science and technology. This book provides an introduction to the microscopes so that scientists and engineers can learn both how to use them, and what they can do.