Advanced Surface Metrology for Micro- & Nanofabrication

Surface Metrology for Micro- and Nanofabrication presents state-of-the-art measurement technologies for surface metrology in fabrication of micro- and nanodevices or components. This includes the newest general-purpose scanning probe microscopes, and both contact and non-contact surface profilers. In addition, the book outlines characterization and calibration techniques, as well as in-situ, on-machine, and in-process measurements for micro- and nanofabrication. Provides materials scientists and engineers with an informed overview of the state-of-the-art in surface metrology Helps readers select and design the optimized surface metrology systems and carry out proper surface metrology practices in the fabrication of micro/nano-devices and components Assesses the best techniques for repairing micro-defects

Hybrid Machining: Theory, Methods, and Case Studies covers the scientific fundamentals, techniques, applications and real-world descriptions of emerging hybrid machining technology. This field is advancing rapidly in industrial and academic contexts, creating a great need for the fundamental and technical guidance that this book provides. The book includes discussions of basic concepts, process design principles, standard hybrid machining processes, multi-scale modeling approaches, design, on-machine metrology and work handling systems. Readers interested in manufacturing systems, product design or machining technology will find this one-stop guide to hybrid machining the ideal reference. Includes tables of recommended processing parameters for key engineering materials/products for each hybrid machining process Provides case studies covering real industrial applications Explains how to use multiscale modeling for hybrid machining

Advanced Machining Processes of Metallic Materials: Theory, Modelling and Applications, Second Edition, explores the metal cutting processes with regard to theory and industrial practice. Structured into three parts, the first section provides information on the fundamentals of machining, while the second and third parts include an overview of the effects of the theoretical and experimental considerations in high-level machining technology and a summary of production outputs related to part quality. In particular, topics discussed include: modern tool materials, mechanical, thermal and tribological aspects of machining, computer simulation of various process phenomena, chip control, monitoring of the cutting state, progressive and hybrid machining operations, as well as practical ways for improving machinability and generation and modeling of surface integrity. This new edition addresses the present state and future development of machining technologies, and includes expanded coverage on machining operations, such as turning, milling, drilling, and broaching, as well as a new chapter on sustainable machining processes. In addition, the book provides a comprehensive description of metal cutting theory and experimental and modeling techniques, along with basic machining processes and their effective use in a wide range of manufacturing applications. The research covered here has contributed to a more generalized vision of machining technology, including not only traditional manufacturing tasks, but also potential (emerging) new applications, such as micro and nanotechnology. Includes new case studies illuminate experimental methods and outputs from different sectors of the manufacturing industry Presents metal cutting processes that would be applicable for various technical, engineering, and scientific levels Includes an updated knowledge of standards, cutting tool materials and tools, new machining technologies, relevant machinability records, optimization techniques, and surface integrity

Electrochemical Micromachining for Nanofabrication, MEMS and Nanotechnology is the first book solely dedicated to electrochemical micromachining (EMM). It begins with fundamentals, techniques, processes, and conditions, continuing with in-depth discussions of mechanisms of material removal, including an empirical model on the material removal rate for EMM (supported by experimental validation). The book moves next to construction-related features of EMM setup suitable for industrial micromachining applications, varying types of EMM, and the latest developments in the improvement of EMM setup. Further, it covers power supply, roll of electrolyte, and other major factors influencing EMM processes, and reports research findings concerning the improvement of machining accuracy and efficiency. Finally, the book devotes a chapter to the design and development of micro-tools, one of the most vital components in EMM. Covers the generation of micro features used for advanced engineering of materials for fabrication of MEMS, microsystems and other micro-engineering applications Explores the trend of decreasing size of fabricated devices, reflected in coverage of generation of high-precision nano-features on metal and semiconductors utilizing SPM, STM, and AFM, and nanotechnology aspects of EMM Describes nanofabrication utilizing anodic dissolutions for mass manufacturing by overcoming obstacles utilizing electrochemical microsystem technology (EMST) and electrochemical nanotechnology (ENT)

This book is a comprehensive treatment of micro and nanofabrication techniques, and applies established and research laboratory manufacturing techniques to a wide variety of materials. It is a companion volume to “Micro and Nanomanufacturing” (2007) and covers new topics such as aligned nanowire growth, molecular dynamics simulation of nanomaterials, atomic force microscopy for microbial cell surfaces, 3D printing of pharmaceuticals, microvascular coaptation methods, and more. The chapters also cover a wide variety of applications in areas such as surgery, auto components, living cell detection, dentistry, nanoparticles in medicine, and aerospace components. This is an ideal text for professionals working in the field, and for graduate students in micro and nanomanufacturing courses.

For the promotion of global trading and the reduction of potential risks, the role of international standardization of nanotechnologies has become more and more important. This book gives an overview of the current status of nanotechnology including the importance of metrology and characterization at the nanoscale, international standardization of nanotechnology, and industrial innovation of nano-enabled products. First the field of nanometrology, nanomaterial standardization and nanomaterial innovation is introduced. Second, major concepts in analytical measurements are given in order to provide a basis for the reliable and reproducible characterization of nanomaterials. The role of standards organizations are presented and finally, an overview of risk management and the commercial impact of metrology and standardization for industrial innovations.

The function of a component part can be profoundly affected by its surface topography. There are many examples in nature of surfaces that have a well-controlled topography to affect their function. Examples include the hydrophobic effect of the lotus leaf, the reduction of fluid drag due to the riblet structure of shark skin, the directional adhesion of the gecko foot and the angular sensitivity of the multi-faceted fly eye. Surface structuring is also being used extensively in modern manufacturing. In this way many properties can be altered, for example optical, tribological, biological and fluidic. Previously, single line (profile) measurements were adequate to control manufacture of surfaces, but as the need to control the functionality of surfaces increases, there is a growing need for three-dimensional (areal) measurement and characterisation techniques. For this reason there has been considerable research, development and standardisation of areal techniques. This book will present the areal framework that is being adopted by the international community. Whereas previous books have concentrated on the measurement aspects, this book concentrates on the characterisation techniques, i.e. how to interpret the measurement data to give the appropriate (functional) information for a given task. The first part of the book presents the characterisation methods and the second part case studies that highlight the use of areal methods in a broad range of subject areas - from automobile manufacture to archaeology. Contents Introduction to Surface Topography The Areal Field Parameters The Areal Feature Parameters Areal Filtering Methods Areal Form Removal Areal Fractal Methods Choosing the Appropriate Parameter Characterisation of Individual Areal Features Multi-Scale Signature of Surface Topography Correlation of Areal Surface Texture Parameters to Solar Cell Efficiency Characterisation of Cylinder Liner Honing Textures for Production Control Characterisation of the Mechanical Bond Strength for Copper on Glass Plating Applications Inspection of Laser Structured Cams and Conrods Road Surfaces

A fully comprehensive examination of state-of-the-art technologies for measurement at the small scale • Highlights the advanced research work from industry and academia in micro-nano devices test technology • Written at both introductory and advanced levels, provides the fundamentals and theories • Focuses on the measurement techniques for characterizing MEMS/NEMS devices

This publication deals with the latest developments in the field of 3D surface metrology and will become a seminal text in this important area. It has been prepared with the support of the European Community’s Directorate General XII and represents the culmination of research conducted by 11 international partners as part of an EU-funded project. The aim of the project is to inform standards bodies of the possibilities that exist for a new international standard covering the field of 3D surface characterisation. The book covers a description of the proposed 3D surface parameters and advanced filtering techniques using wavelet and robust Gaussian methodologies. The next generation areal surface characterisation theories are discussed and their practical implementation is illustrated. It describes techniques for calibration of 3D instrumentation, including stylus instruments as well as scanning probe instrumentation. Practical verification of the 3D parameters and the filtering is illustrated through a series of case studies which cover bio-implant surfaces, automotive cylinder liner and steel sheet. Finally, future developments of the subject are alluded to and implications for future standardisation and development are discussed.

The measurement and characterisation of surface topography is crucial to modern manufacturing industry. The control of areal surface structure allows a manufacturer to radically alter the functionality of a part. Examples include structuring to effect fluidics, optics, tribology, aerodynamics and biology. To control such manufacturing methods requires measurement strategies. There is now a large range of new optical techniques on the market, or being developed in academia, that can measure areal surface topography. Each method has its strong points and limitations. The book starts with introductory chapters on optical instruments, their common language, generic features and limitations, and their calibration. Each type of modern optical instrument is described (in a common format) by an expert in the field. The book is intended for both industrial and academic scientists and engineers, and will be useful for undergraduate and postgraduate studies.

Working at the nano-scale demands an understanding of the high-precision measurement techniques that make nanotechnology and advanced manufacturing possible. Richard Leach introduces these techniques to a broad audience of engineers and scientists involved in nanotechnology and manufacturing applications and research. He also provides a routemap and toolkit for metrologists engaging with the rigor of measurement and data analysis at the nano-scale. Starting from the fundamentals of precision measurement, the author progresses into different measurement and characterization techniques. The focus on nanometrology in engineering contexts makes this book an essential guide for the emerging nanomanufacturing / nanofabrication sector, where measurement and standardization requirements are paramount both in product specification and quality assurance. This book provides engineers and scientists with the methods and understanding needed to design and produce high-performance, long-lived products while ensuring that compliance and public health requirements are met. Updated to cover new and emerging technologies, and recent developments in standards and regulatory frameworks, this second edition includes many new sections, e.g. new technologies in scanning probe and e-beam microscopy, recent developments in interferometry and advances in co-ordinate metrology. Demystifies nanometrology for a wide audience of engineers, scientists, and students involved in nanotech and advanced manufacturing applications and research Introduces metrologists to the specific techniques and equipment involved in measuring at the nano-scale or to nano-scale uncertainty Fully updated to cover the latest technological developments, standards, and regulations

This volume presents a comprehensive perspective on the global scientific, technological, and societal impact of nanotechnology since 2000, and explores the opportunities and research directions in the next decade to 2020. The vision for the future of nanotechnology presented here draws on scientific insights from U.S. experts in the field, examinations of lessons learned, and international perspectives shared by participants from 35 countries in a series of high-level workshops organized by Mike Roco of the National Science Foundation (NSF), along with a team of American co-hosts that includes Chad Mirkin, Mark Hersam, Evelyn Hu, and several other eminent U.S. scientists. The study performed in support of the U.S. National Nanotechnology Initiative (NNI) aims to redefine the R&D goals for nanoscale science and engineering integration and to establish nanotechnology as a general-purpose technology in the next decade. It intends to provide decision makers in academia, industry, and government with a nanotechnology community perspective of productive and responsible paths forward for nanotechnology R&D.

Nanoelectronics is changing the way the world communicates, and is transforming our daily lives. Continuing Moore’s law and miniaturization of low-power semiconductor chips with ever-increasing functionality have been relentlessly driving R&D of new devices, materials, and process capabilities to meet performance, power, and cost requirements. This book covers up-to-date advances in research and industry practices in nanometrology, critical for continuing technology scaling and product innovation. It holistically approaches the subject matter and addresses emerging and important topics in semiconductor R&D and manufacturing. It is a complete guide for metrology and diagnostic techniques essential for process technology, electronics packaging, and product development and debugging—a unique approach compared to other books. The authors are from academia, government labs, and industry and have vast experience and expertise in the topics presented. The book is intended for all those involved in IC manufacturing and nanoelectronics and for those studying nanoelectronics process and assembly technologies or working in device testing, characterization, and diagnostic techniques.

Precision Nanometrology describes the new field of precision nanometrology, which plays an important part in nanoscale manufacturing of semiconductors, optical elements, precision parts and similar items. It pays particular attention to the measurement of surface forms of precision workpieces and to stage motions of precision machines. The first half of the book is dedicated to the description of optical sensors for the measurement of angle and displacement, which are fundamental quantities for precision nanometrology. The second half presents a number of scanning-type measuring systems for surface forms and stage motions. The systems discussed include: • error separation algorithms and systems for measurement of straightness and roundness, • the measurement of micro-aspherics, • systems based on scanning probe microscopy, and • scanning image-sensor systems. Precision Nanometrology presents the fundamental and practical technologies of precision nanometrology with a helpful selection of algorithms, instruments and experimental data. It will be beneficial for researchers, engineers and postgraduate students involved in precision engineering, nanotechnology and manufacturing.

Finishing is the final operation after a part is sized and shaped. Currently in high tech industries, there is a demand for nano level surface finishing of components. This process is done to improve the surface finish, to remove the recast layer, or to remove surface and sub-surface defects. The result is low friction, longer product life, and low power requirements. Equally important is the aesthetic aspect of the product. This subject is growing very fast from the technology as well as a science point of view. Books on this subject are very limited, particularly those ones that deal with both the science as well as the technology aspects.

Nanoscale science and technology have occupied centre stage globally in modern scientific research and discourses in the early twenty first century. The enabling nature of the technology makes it important in modern electronics, computing, materials, healthcare, energy and the environment. This volume contains selected articles presented (as Invited/Oral/Poster presentations) at the 2nd international conference on advanced materials and nanotechnology (ICANN-2011) held recently at the Indian Institute of Technology Guwahati, during Dec 8-10, 2011. The list of topics covered in this proceedings include: Synthesis and self assembly of nanomaterials Nanoscale characterisation Nanophotonics & Nanoelectronics Nanobiotechnology Nanocomposites F Nanomagnetism Nanomaterials for Energy Computational Nanotechnology Commercialization of Nanotechnology The conference was represented by around 400 participants from several countries including delegates invited from USA, Germany, Japan, UK, Taiwan, Italy, Singapore, India etc.

This book presents applicable knowledge of technology, equipment and applications, and the core economic issues of micromanufacturing for anyone with a basic understanding of manufacturing, material, or product engineering. It explains micro-engineering issues (design, systems, materials, market and industrial development), technologies, facilities, organization, competitiveness, and innovation with an analysis of future potential. The machining, forming, and joining of miniature / micro-products are all covered in depth, covering: grinding/milling, laser applications, and photo chemical etching; embossing (hot & UV), injection molding and forming (bulk, sheet, hydro, laser); mechanical assembly, laser joining, soldering, and packaging. • Presents case studies, material and design considerations, working principles, process configurations, and information on tools, equipment, parameters and control • Explains the many facets of recently emerging additive / hybrid technologies and systems, incl: photo-electric-forming, liga, surface treatment, and thin film fabrication • Outlines system engineering issues pertaining to handling, metrology, testing, integration & software • Explains widely used micro parts in bio / medical industry, information technology and automotive engineering. • Covers technologies in high demand, such as: micro-mechanical-cutting, lasermachining, micro-forming, micro-EDM, micro-joining, photo-chemical-etching, photo-electro-forming, and micro-packaging

Selected, peer reviewed papers from the International Conference on Nanotechnology and Precision Engineering (ICNPE 2012), December 18-19, 2012, Guangzhou, China

This book describes the state of the art in the field of bioanalytical nano- and microsystems with optical functionality. In 12 chapters distinguished scientists and leaders in their respective fields show how various optical technologies have been miniaturized and integrated over the last few decades in order to be combined with nano- and microsystems for applications in the life sciences. The main detection and characterization technologies are introduced, and examples of the superiority of these integrated approaches compared to traditional ones are provided. Examples from e.g. the fields of optical waveguides, integrated interferometers, surface plasmon resonance or Raman spectroscopy are introduced and discussed, and it is shown how these approaches have led to novel functionalities and thereby novel applications.

Now in its third edition, Fundamentals of Microfabrication and Nanotechnology continues to provide the most complete MEMS coverage available. Thoroughly revised and updated the new edition of this perennial bestseller has been expanded to three volumes, reflecting the substantial growth of this field. It includes a wealth of theoretical and practical information on nanotechnology and NEMS and offers background and comprehensive information on materials, processes, and manufacturing options. The first volume offers a rigorous theoretical treatment of micro- and nanosciences, and includes sections on solid-state physics, quantum mechanics, crystallography, and fluidics. The second volume presents a very large set of manufacturing techniques for micro- and nanofabrication and covers different forms of lithography, material removal processes, and additive technologies. The third volume focuses on manufacturing techniques and applications of Bio-MEMS and Bio-NEMS. Illustrated in color throughout, this seminal work is a cogent instructional text, providing classroom and self-learners with worked-out examples and end-of-chapter problems. The author characterizes and defines major research areas and illustrates them with examples pulled from the most recent literature and from his own work.